Vacuum Diagnosis with an RGA
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چکیده
Stanford Research Systems phone: (408)744-9040 www.thinkSRS.com Residual Gas Analyzer (RGA) is the term used for a class of quadrupole mass spectrometers that typically cover mass ranges from 1 to 100 or 200 amu (atomic mass units), and are intended to be used for the analysis of the gasses present in high and ultra-high vacuum. The RGA’s resolution is sufficient to clearly distinguish peaks that are 1 amu apart. These specifications are a perfect match for the requirements of vacuum diagnosis. Not many materials with a mass greater than 200 amu will be volatile, and the high resolution of research grade mass spectrometers is not necessary for the analysis of low molecular weight species. Overall, RGAs are affordable instruments that can be permanently attached to a vacuum system.
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